Semiconductor device

ABSTRACT

According to one embodiment, a semiconductor device includes at least a package substrate, an external electrode, a mounting substrate, and a mounting electrode. A signal connection point of the external electrode is provided at an end portion in a longitudinal direction of the external electrode. A signal connection point of the mounting electrode is provided at an end portion of the mounting electrode. The end portion of the mounting electrode is opposite to the signal connection point of the external electrode facing to the mounting electrode in the longitudinal direction.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2019-038547, filed on Mar. 4, 2019, andJapanese Patent Application No. 2019-181565, filed on Oct. 1, 2019; theentire contents of all of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a semiconductor device.

BACKGROUND

A PGA (Pin Grid Array), a BGA (Ball Grid Array), a LGA (Land GridArray), etc., are used as packages of semiconductor integrated circuitssuch as LSI, etc.; and among these, the PGA and the LGA areboard-mountable by using a socket or the like without using fixation bysolder fusion, and are used as repairable packages that are detachableand re-attachable as necessary.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are schematic configuration diagrams showing asemiconductor device of a first embodiment;

FIG. 2 is an explanation drawing of a configuration of an electricalcontact surface of the semiconductor device of the first embodiment;

FIGS. 3A to 3C are schematic configuration diagrams showing thesemiconductor device of the first embodiment;

FIGS. 4A to 4C are schematic configuration diagrams showing asemiconductor device of a second embodiment;

FIGS. 5A and 5B are schematic configuration diagrams showing asemiconductor device of a third embodiment;

FIGS. 6A to 6C are schematic configuration diagrams showing thesemiconductor device of the third embodiment;

FIG. 7 is a schematic configuration diagram showing a semiconductordevice of a fourth embodiment;

FIG. 8 is a schematic configuration diagram showing a semiconductordevice of a fifth embodiment;

FIG. 9 is a schematic configuration diagram showing a semiconductordevice of the fifth embodiment; and

FIG. 10 is a schematic configuration diagram showing a semiconductordevice of a sixth embodiment.

DETAILED DESCRIPTION

As the integration density of LSI has been increased, the size of thepackage has been enlarged and the terminal pitch of the package has beenreduced due to the increase of the number of necessary terminals on thepackage, However, while solder ball mounting having a terminal pitch ofabout 0.3 mm has been realized for the BGA, the terminal pitch for thePGA and the LGA has remained at about 0.5 mm due to the mechanicalprecision; and it is difficult to realize a narrow terminal pitch of arepairable package that does not use solder fusion.

An embodiment of the invention is directed to provide a semiconductordevice in which a narrower terminal pitch of 0.3 mm or less iseffectively realizable and excellent connection characteristics atextremely high frequencies can be provided even in a repairable package.

According to one embodiment, a semiconductor device includes at least apackage substrate, an external electrode, a mounting substrate, and amounting electrode. A semiconductor chip is mountable to the packagesubstrate. The external electrode is provided at an external electrodeformation surface of the package substrate. The external electrode hasan electrical contact surface. The electrical contact surface at theexternal electrode formation surface is longer in a signal transmissiondirection than in a direction orthogonal to the signal transmissiondirection. The package substrate is mounted on the mounting substrate.The mounting electrode is provided at a position of the mountingsubstrate opposing the external electrode. The mounting electrode has anelectrical contact surface. The electrical contact surface of themounting electrode is longer in a signal transmission direction than ina direction orthogonal to the signal transmission direction. A signalconnection point of the external electrode is provided at an end portionin a longitudinal direction of the external electrode. A signalconnection point of the mounting electrode is provided at an end portionof the mounting electrode. The end portion of the mounting electrode isopposite to the signal connection point of the external electrode facingto the mounting electrode in the longitudinal direction.

Embodiments will now be described with reference to the drawings asappropriate. For convenience of description, the scale in each drawingis not always accurate; and relative positional relationships, etc., maybe used. Also, the same or similar components are marked with the samereference numerals.

A semiconductor integrated circuit such as LSI or the like is a deviceused as the core of an information communication device; and thenecessary number of terminals on the package is increasing as theintegration density necessary for the performance improvement of thesemiconductor integrated circuit increases. To this end, the size of thepackage has been enlarged and the terminal pitch of the package has beenreduced; but as described above, while a terminal pitch of 0.3 mm hasbeen realized for the BGA using micromounting technology using fusion ofmicro solder balls, for the PGA and the LGA which require amechanical-electrical contact mechanism, the realizable terminal pitchdue to the scaling limit of the mechanical-electrical contact mechanismis about 0.5 mm.

As the electrical contact mechanism described above, a pin socket arrayis generally used for the PGA; and a spring terminal array of C-shapedsprings or cantilever springs is generally used for the LGA. Both arrayshave independent spring mechanisms for each terminal and maintain theterminal contact by pressing by the spring elasticity. Accordingly, inthese repairable packages in which LSI is interchangeable withoutoperations such as solder reflow or the like that cause memberdegradation, the downscaling of the spring mechanism determines theterminal pitch; and the limit of narrowing the terminal pitch is causedby the mechanical configuration,

On the other hand, a repairable package that has a relatively fineterminal pitch can be configured using a LGA package and an anisotropicconductive contactor such as those shown in Japanese Patent ApplicationPublication No. Sho 61-133586, Japanese Patent Application PublicationNo. Hei 9-283252, and Japanese Patent Application Publication No.2001-281300. In such a case, the conductive core wire pitch of theanisotropic conductive contactor determines the LGA package terminalpitch; for example, in the case of an anisotropic conductive contactorhaving a conductive core wire pitch of 50 μm, a LGA package that has aterminal pitch of about 0.3 mm is realizable. However, it is necessaryto reduce the contact resistance by ensuring the electrode pad surfaceareas of the LGA package and the mounting substrate, i.e., the number ofconductive core wires of the anisotropic conductive contactor contactingthe electrode pads; and even in such a case, a narrow terminal pitch of0.3 mm or less is substantially difficult.

First Embodiment

FIGS. 1A to 1C are schematic configuration diagrams showing a firstembodiment. FIG. 1A is a plan view of an external electrode formationsurface 1 a of a package substrate 1; FIG. 1B is a view along arrow A inFIG. 1A; and FIG. 1C is a view along arrow B in FIG. 1A.

Multiple external electrodes (hereinbelow, also called packageterminals; and the electrical contact surfaces also are called electrodepads) 2 are provided at the external electrode formation surface 1 a ofthe package substrate 1. For example, a semiconductor chip 3 such as LSIor the like is mounted on the surface of the package substrate 1 on theside opposite to the external electrode formation surface 1 a.

The external electrode 2 has an electrical contact surface 2 a which isa substantially flat surface, and a signal connection point 2 b. Theelectrical contact surface 2 a (the pad configuration) is long in thelateral direction of FIG. 1A and short in the vertical direction of FIG.1A. In the external electrode formation surface 1 a shown in FIG. 1A,for example, the lateral direction is the signal transmission direction.The size in the signal transmission direction of the electrical contactsurface 2 a is longer than the size in a direction (the verticaldirection of FIG. 1A) orthogonal to the signal transmission direction.This configuration is the configuration for the electrical contactsurface 2 a; and when the external electrode 2 other than the electricalcontact surface 2 a is covered with, for example, a solder resist, anyconfiguration may be used inside the solder resist (on the packagesubstrate 1 side). The signal connection point 2 b is located on asignal source side of the electrical contact surface 2 a. The signalconnection point 2 b is provided at an end portion in the longitudinaldirection of the electrical contact surface 2 a. A signal is transmittedtoward an end portion of the electrical contact surface 2 a, opposite tothe signal connection point 2 b. The embodiment realizes a substantiallynarrower terminal pitch or a partially narrower terminal pitch for onlythe necessary portions by a configuration such as the following.

Generally, the portion of the semiconductor package that needs anarrower terminal pitch is the signal transmission terminals; and fineterminals are not really necessary for power supply terminals andcontrol terminals. Therefore, for example, by forming the signaltransmission terminals at a narrower pitch and the power supplyterminals and/or the control terminals at a relatively wide terminalpitch, an effectively narrower terminal pitch is possible, However,asymmetric package terminal configurations often are prohibited forsolder fusion-type packages (BGA, etc.) and terminal-fixed packages(PGA, etc.) due to problems such as terminal damage caused by thermalstress concentration, etc. In particular, the terminal connection of asolder fusion-type package such as the BGA or the like is made uniformby utilizing the surface tension of the melted solder; therefore, it isdifficult to apply an asymmetric terminal configuration such as thatshown in FIG. 1A. This can be seen from descriptions such as that ofPatent Literature 4 in which the solder connection portion is set to becircular even when a noncircular electrode configuration is necessary.

On the other hand, in a LGA package that is electrically connected onlyby mechanical contact, problems do not occur easily even for electrodepads such as those of FIG. 1A because stress relief is possible by theterminals shifting in a direction parallel to the contact surface. Inthe embodiment, by providing a narrower pitch for the signaltransmission terminals, and particularly for high-speed transmissionterminals, a LGA package that has an effectively narrow terminal pitchis realized. In other words, according to the embodiment, a repairablepackage that has narrower-pitch terminals of substantially 0.3 mm orless is realizable; in particular, a semiconductor device can beprovided in which the connection characteristics at extremely highfrequencies are excellent.

FIG. 2 is a schematic configuration diagram describing the configurationof the electrode pads shown in FIG. 1A; two of each of a circularelectrode pad 200 used in a general package and an electrode pad 201used in the embodiment are shown by solid lines as a minimum unit forcomparison; and the other broken lines show the repeated arrangement ofthe electrode pads. Here, a configuration that is easily used in arelative comparison to the circular electrode pad of the general packageis selected as an example; and the electrode pad 201 is not limited tothe configuration of FIG. 2.

In FIG. 2, the radius of the circular pad 200 is taken as r; and thespacing between the adjacent electrodes is taken as s; that is, the padpitch (the terminal pitch), is taken as 2r+s. Of course, r and s aresettable to any value. The width (the width in the direction orthogonalto the signal transmission direction) of the electrode pad 201 is set tor; the length (the length in the signal transmission direction) of theelectrode pad 201 is set to the amount for two circular pads (4r+s); andthe dedicated surface area per pitch is (2r+s)²=4r²+4rs+s² for thecircular pad 200 and (4r+2s) (r+s/2)=4r²+4rs+s² for the electrode pad201, and is exactly the same between the circular pad 200 and theelectrode pad 201. On the other hand, the pad pitch of the electrodepads 201 is 4r+2s=2(2r+s) in the lateral direction of FIG. 2 and(2r+s)/2 in the vertical direction of FIG. 2, and compared to thecircular pad 200, is double-pitch in the lateral direction of FIGS. 2and ½ pitch in the vertical direction of FIG. 2.

In such a case, the electrode surface area is πr² for the circular pad200 and 4r²+rs for the electrode pad 201; and the electrode pad 201 hasa wider surface area by the amount of (4−π)r²+rs. In other words, it canbe seen that for the same dedicated surface area, the terminal pitch canbe ½ albeit in only a designated direction; the electrode surface areacan be even wider; and the contact resistance can be equal or less, Thisis useful when performing high density wiring of high-speed signalterminals, etc., and means that, for example, the pitch of drawing outthe high-speed wiring of the package in the right direction in FIG. 2can be reduced to ½, and the transmission band density per unit widthcan be increased to 2 times.

In particular, when performing differential wiring, the packageterminals and the mounting substrate terminals can be arranged to beparallel in a symmetric configuration; therefore, the electromagneticfield symmetry of the differential signal can be maintained easily; theimpedance mismatch of the electrode pads can be suppressed easily; andfor the wave motion, reflections can be minimized. In other words, thewiring band density can be increased to 2 times; and the quality of thehigh frequency signal transmission can be improved.

It is possible to realize such a terminal pitch using the circular pad200 by setting the total dedicated surface area of the electrode pad tobe the same using two columns of the circular pads 200; but it isnecessary to use an arrangement in which, for example, if the high-speedwiring is drawn out in the right direction of FIG. 2, one of thedifferential wiring is the circular pad 200 on the outer side (the rightside of FIG. 2); and the other is the circular pad 200 on the inner side(the left side of FIG. 2). In such a case, as a total of the wiring ofthe package terminals and the wiring of the mounting substrateterminals, the wiring length and the wiring bending configuration can bemade symmetric between the differential wiring; but due to thecombination of the long wiring on the package substrate and the longwiring on the mounting substrate, problems easily occur such astransmission waveform distortion being generated easily due to theasymmetry of the wiring material, the wiring thickness, etc; a portionof the differential transmission mode being converted into a commonmode, etc. Also, for general transmission line design (e.g., a line of50Ω), the transmission line (wiring) width is drastically narrower thanthe electrode pad 200; and the wiring width must be widened at theelectrode pad portion. Therefore, the impedance mismatch and thewave-motion signal reflections easily become large; and the transmissionquality of the high frequency signal degrades easily. As a result, thesignal speed (the wiring band) is suppressed undesirably; therefore, theband density is undesirably low compared to the electrode pad 201.

For the surface area of the electrode pad, if applications to BGApackages are ignored, it is possible to increase the electrode surfacearea by using a square pad having sides of 2r instead of the circularpad 200. Even in such a case, the dedicated surface area per pitch canbe the same as the circular pad 200; and the surface area of theelectrode pad can be widened to 4r². However, in such a case as well,the surface area of the electrode pad 201 is wider by the amount of rs;and the dominance is not changed for the contact resistance, thehigh-speed transmission quality, the transmission band density, etc.Although the space in the lateral direction of FIG. 2 between theelectrode pads 201 is s, the electrode surface area (the contact surfacearea) can be widened further by the amount of rs/2 by setting the spaceto be s/2.

FIG. 3A is a schematic cross-sectional view showing the connection stateof a LGA package and a mounting substrate 4 in which an anisotropicconductive contactor 6 is used.

Multiple mounting electrodes (mounting substrate terminals) 5 areprovided at positions of the mounting substrate 4 opposing the externalelectrodes (the package terminals) 2 of the LGA package. The mountingelectrode 5 has an electrical contact surface 5 a. A size of theelectrical contact surface 5 a in the signal transmission direction islonger than a size of the electrical contact surface 5 a in a directionorthogonal to the signal transmission direction, A signal connectionpoint 5 b of the mounting electrode 5 is provided at an end portion inthe longitudinal direction opposite to the signal connection point 2 bof the external electrode 2 of the LGA package. The signal connectionpoint 2 b of the external electrode 2 is a connection via (for example,a filled via) provided on the package substrate 1. The signal connectionpoint 5 b of the mounting electrode 5 is a connection via (for example,a filled via) provided on the mounting substrate 4. The signalconnection point 2 b and the signal connection point 5 b are located atopposite ends in the longitudinal direction of the external electrode 2and the mounting electrode 5 facing each other. The signal connectionpoint 2 b of the external electrode 2 is electrically connected to aninner interconnection 2 c and an inner via 2 d provided in the packagesubstrate 1. The signal connection point 5 b of the mounting electrode 5is electrically connected to an inner interconnection 5 c and an innervia 5 d provided in the mounting substrate 4.

The anisotropic conductive contactor 6 is inserted between theelectrical contact surface 2 a of the external electrodes 2 and theelectrical contact surface 5 a of the mounting electrodes 5. In theanisotropic conductive contactor 6, conductive core wires 7 electricallyconnect the external electrodes 2 and the mounting electrodes 5 byproviding a feedthrough connection between the upper and lower surfacesof an insulating member 8 of, for example, a silicone resin, etc.

As described in Patent Literature 2, etc,, the electrical connectabilityis maintained and the elastic deformation due to pressing by theterminals (the package terminals 2 and the mounting substrate terminals5) on the anisotropic conductive contactor 6 is permitted by forming theconductive core wires 7 obliquely with respect to the electricalconnection direction.

A signal is transmitted between the package substrate 1 and the mountingsubstrate 4 via an electrical contact of an overlapping portion of theexternal electrode 2 and the mounting electrode 5. A signal istransmitted in the longitudinal direction of the external electrode 2and the mounting electrode 5. A signal is transmitted to the signalconnection point 5 b from the signal connection point 2 b, ortransmitted to the signal connection point 2 b from the signalconnection point 5 b. For example, as shown by the dashed arrow in FIG.3A, a signal input from Si is output to So. The Si is connected to thesignal connection point 2 b of the external electrode 2 via the innerinterconnection 2 c and the inner via 2 d. The So is connected to thesignal connection point 5 b of the mounting electrode 5 via the innerinterconnection 5 c and the inner via 5 d. This structure allows fornarrow pitch terminal-to-terminal connections. Further, unnecessaryelectrode expansion in a direction different from the signaltransmission direction can be minimized. This enables highspeedtransmission by minimizing the waveform distortion of the transmissionsignal.

For example, in the case where the signal connection point 2 b and thesignal connection point 5 b are positioned close to the same end portionof the overlapping portion of the external electrode 2 and the mountingelectrode 5, the electrode extends in a direction perpendicular to thesignal transmission direction from the end portion to the opposite endportion. This is a so-called stub structure that is a major factor indistorting the transmission signal waveform. In the case where thesignal connection point 2 b and the signal connection point 5 b arepositioned at the center portion of the overlapping portion of theexternal electrode 2 and the mounting electrode 5, the stub structuredistorting the transmission signal waveform is similarly formed.Therefore, the signal connection point 2 b and the signal connectionpoint 5 b are preferably positioned close as possible to opposite endportions of the external electrode 2 and the mounting electrode 5 withshifting in different direction from the center portion of theoverlapping. portion of the external electrode 2 and the mountingelectrode 5.

FIG. 36 shows the upper surface (or the lower surface) of theanisotropic conductive contactor 6 and shows the conductive core wires 7provided in an array configuration. The orderly arrangement of theconductive core wires 7 is dependent on the manufacturing method; and ifthe arrangement of the conductive core wires 7 is random, the spacing ofthe conductive core wires 7 is not constant; a nonuniformity of theelastic deformation due to the terminal pressing occurs; dielectricbreakdown and/or contact between partially-adjacent conductive corewires 7 occurs; and shorts undesirably occur between the mountingsubstrate terminals 5 and/or the package terminals 2 to be connected.

In other words, the arrangement uniformity of the conductive core wires7 relates to the connection reliability of the anisotropic conductivecontactor 6; and basically, it is necessary to arrange the conductivecore wires 7 at a prescribed pitch. Here, the arrangement pitch of theconductive core wires 7 is taken as Pc; the arrangement pitch is takenas Ps in the orthogonal direction; and it is taken that the asymmetry ofPc>Ps exists.

In FIG. 36, the broken line shows the contact position of the electrodepad 201 shown in FIG. 2 with the conductive core wires 7. Theconfiguration of the electrode pad 201 is, for example, rectangular; andthe width of each side of the electrode pad 201 is not less than thearrangement pitch of the conductive core wires 7 as the condition for atleast one of the conductive core wires 7 to contact the electrode pad201 at some position.

In other words, in FIG. 36, it is sufficient for the width of the shortside of the electrode pad 201 (the rectangle) to be not less than Pc andPs; and from the assumption recited above, it is sufficient for theshort side to be not less than Pc. When the electrode pad 201 is not arectangle but is, for example, an ellipse, it is sufficient for themaximum width of the minor axis of the ellipse to be not less than Pc.In other words, the arrangement pitches Pc and Ps of the conductive corewires 7 are shorter than the width of the short side of the electricalcontact surface of the electrode pad 201. In FIG. _(36,) the verticaldirection is the signal transmission direction; and the width of theshort side of the electrical contact surface of the electrode pad 20.1is the width in the direction orthogonal to the signal transmissiondirection (in FIG. 36, the lateral direction).

For the rectangular electrode pad 201 described above, all of theelectrode pads 201 are in contact with multiple conductive core wires 7if the short side of the rectangle is not less than Pc, the long side ofthe rectangle is substantially uniform in the arrangement direction ofthe conductive core wires 7, and the dimensional relationship is, forexample, such as that shown in FIG. 3B; and the number of the conductivecore wires 7 contacting one electrode pad may be nonuniform. Such asymptom occurs easily when the width of the electrode pad and the arraypitch of the conductive core wires 7 are relatively near each other,that is, for the dimensional relationship to obtain the limiting narrowterminal pitch which is an object of the embodiment. In the case of FIG.38, by considering the end portion surface area of the conductiveterminals contacting the electrode pad 201, the effective number ofconductive terminals contacting the electrode pad 201 is about 6, about9, about 9, and about 6 from the electrode pad 201 on the left side; andthere is a difference of about 1.5 times. This means that the contactresistance fluctuates by about 1.5 times between the electrode pads 201;and the uniformity of the connection is not maintained.

To solve the connection nonuniformity, for example, as shown in FIG. 3C,it is effective to set the long-side direction of the electrode pad 201(the signal transmission direction) and the arrangement direction of theconductive core wires 7 of the anisotropic conductive contactor 6deliberately to be different; specifically, the arrangement direction ofthe conductive core wires 7 is set at an angle with respect to thelong-side direction of the electrode pad 201. In FIG. 3C, thearrangement direction of the conductive core wires 7 is tilted about 15°with respect to the long-side direction of the electrode pad 201 (thesignal transmission direction); and as a result, the effective number ofthe conductive terminals in contact is about 8 for each and is uniform.

As a condition of obtaining such an effect of making the connectionuniform, it is desirable to set the tilt of the array arrangement of theconductive core wires 7 to be larger than the angle causing theconductive core wires 7 to shift one pitch over the distance of the longside of the electrode pad 201. In other words, when the long-side lengthof the electrode pad 201 is taken as L and the minimum pitch of theconductive core wires 7 is taken as Ps, it is desirable forθ>tan⁻¹(Ps/L); and considering the tilt of the orthogonal axis as well,it is desirable for the tilt θ to be in a range such that(90−tan⁻¹(Ps/L))>θ>tan⁻¹(Ps/L).

As a result, for example, by setting Pc=Ps=50 μm, r=200 μm, and s=100 μmfor the dimensional relationship of FIG. 2, the terminal pitch of thecircular pad 200 is 0.5 mm; but the short-side terminal pitch of theelectrode pad 201 is 0.25 mm; and a LGA package having an extremelynarrow pitch can be realized. Because the contact resistance is uniformbetween the electrode pads, it can be seen that it is sufficient for thearrangement of the conductive core wires 7 of the anisotropic conductivecontactor 6 to be tilted in the range of 4° to 86°. In such a case, thelong-side terminal pitch of the electrode pad 201 is 1 mm and is large;but by performing the layout of the electrode pads 201 by consideringthe direction of the high-speed signal wiring, a configuration ispossible in which the wiring pitch of the mounting substrate 4 is notlimited by the long-side terminal pitch. In other words, an effectivelynarrower terminal pitch is realized.

Thus, in the embodiment, by providing the signal transmission terminalsat a narrower pitch, a LGA package having an effectively narrow terminalpitch is realized; narrower-pitch terminals of 0.3 mm or less arerealizable in a repairable package; and a semiconductor device havingexcellent high frequency connection characteristics can be provided.

Second Embodiment

FIGS. 4A to 4C are schematic configuration diagrams showing a secondembodiment. FIG. 4A is a plan view of the external electrode formationsurface 1 a of the package substrate 1; FIG. 4B is a view along arrow Aof FIG. 4A; and FIG. 4C is a view along arrow B of FIG. 4A.

The circular external electrode (the electrode pad) 200 and therectangular external electrode (the electrode pad) 201 are provided atthe external electrode formation surface 1 a of the package substrate 1.For example, the circular electrode pad 200 and the rectangularelectrode pad 201 may have the dimensional relationship of FIG. 2. Theelectrode pad 200 is not limited to a circle and may be a polygon. Therectangular electrode pad 201 that is formed to be long in a directiontoward the outer perimeter of the package substrate 1 and the circularor polygonal electrode pad 200 are formed to coexist at the externalelectrode formation surface 1 a of the package substrate 1.

Here, for example, the output is taken to be a highspeed signal (e.g., asignal speed of 26 Gbps) using differential wiring; and the adjacentelectrode pads 201 are used as a pair of terminals of the differentialwiring. For example, the circular electrode pad 200 and the rectangularelectrode pad 201 are laid out with the dimensional relationship of FIG.2 in which r=200 μm and s=100 μm. In other words, from each of the foursides of the package substrate 1, the rectangular electrode pads 201 canoutput high-speed signals at a terminal pitch of 0.25 mm and can bewiring equivalent to that of a package having effectively 0.25-mm-pitchterminals.

In such a case, for example, the pitch of the conductive core wires 7 ofthe anisotropic conductive contactor 6 is set to Pc=Ps=50 μm; and it issufficient for the arrangement of the conductive core wires 7 to betilted 4° to 86° with respect to the rectangular electrode pad 201.

It is sufficient for the power supply terminals, the control terminals,etc., to be supplied or connected by the circular electrode pads 200;and it is no problem for package terminals corresponding to a 0.5-mmpitch to be used for these terminals to ensure the current amount or toconnect for a relatively low-speed signal. It is sufficient to considerthese terminals effectively to be four 0.25-mm terminals usedcollectively; and even if a narrow-terminal-pitch package of 0.25 mmactually is realized, a connection corresponding to four terminals isperformed to ensure the current amount and/or ensure the connectionreliability. For a BGA package or the like, the package mounting heightchanges according to the terminal pitch because the size of the solderballs used changes according to the terminal pitch. Therefore, it cannotbe said that a 0.25-mm pitch is realized because the package height onthe mounting board is different between an actually 0.25-mm pitch BGAand an effectively 0.25-mm pitch BGA. However, the embodimentpresupposes the LGA as a repairable package; and the package Mountingheight does not change according to the terminal pitch. In other words,for the actually 0.25-mm-pitch package and the effectively 0.25-mm-pitchpackage of the embodiment, there is no fundamental difference in theperformance; and the effects are equivalent.

Third Embodiment

FIG. 5A is a plan view of the external electrode formation surface 1 aof the package substrate 1 of a third embodiment. The wiring (e.g.,transmission lines) 9 that are drawn out from the rectangular electrodepads 201 of FIG. 5A are shown in FIG. 5B.

In the embodiment, a so-called staggered arrangement is formed byshifting the arrangement relationship of the rectangular electrode pads201 of two columns by ½ pitch in a direction orthogonal to the signaltransmission direction. As a result, as shown in FIG. 5B, it is possibleto set the terminal pitch of the rectangular electrode pads 201 to p andto set the pitch of the drawn-out wiring 9 to a half pitch of p/2.

Thereby, when using electrode parameters similar to those of FIGS. 4A to4C described above, the pitch of the drawn-out wiring 9 is 0.125 mm; anda semiconductor device having a very narrow terminal pitch difficult torealize using the conventional art of BGAs, PGAs, LGAs, etc., can berealized.

FIGS. 6A to 6C show an embodiment in which the rectangular electrodepads 201 shown in FIG. 5A are applied to package terminals similar tothose of FIGS. 4A to 4C. Thereby, a highspeed signal is outputtable at aterminal pitch of 0.125 mm from each of the four sides of the packagesubstrate 1, that is, a package having effectively 0.125-mm-pitchterminals can be realized.

Fourth Embodiment

FIG. 7 is a schematic configuration diagram showing a fourth embodiment.The mounting substrate 4 has a cavity 10 made of a partial recess; andthe mounting electrodes (the mounting substrate terminals) 5 areprovided at the bottom surface of the cavity 10.

In such a case, the positional alignment between the external electrodes(the package terminals) 2 of the package substrate 1 and the mountingelectrodes 5 of the mounting substrate 4 is simplified; and it issufficient to drop the package substrate 1 into the recess of the cavity10 of the mounting substrate 4. Of course, the connection is performedby inserting the anisotropic conductive contactor 6 between the packagesubstrate 1 and the mounting substrate 4 and by mounting a holder (notillustrated) pressing the package substrate 1.

In such a case, the exterior form of the anisotropic conductivecontactor 6 is cut to match the recess configuration of the cavity 10 ofthe mounting substrate 4. The recess opening of the cavity 10 is set tobe a polygon; and the exterior form of the anisotropic conductivecontactor 6 matches the configuration of the recess opening of thecavity 10. The exterior form of the anisotropic conductive contactor 6is cut in a direction causing the arrangement direction of theconductive core wires 7 to be different from the direction of each sideof the package terminals 2 and the mounting substrate terminals 5.

Fifth Embodiment

FIG. 8 is a schematic configuration diagram showing a fifth embodiment,and is an embodiment in which the anisotropic conductive contactor 6 istemporarily fixed by engaging a protrusion (a convex portion) 11 formedin the package substrate 1.

The protrusion 11 is provided partially at the external electrodeformation surface 1 a of the package substrate 1; and the anisotropicconductive contactor 6 is held by the protrusion 11. The protrusion 11may be, for example, a heat-dissipating metal, etc.

By setting the height of the protrusion 11 to be lower than thethickness of the anisotropic conductive contactor 6, the protrusion 11can be used as a stopper when pressing the package substrate 1. Theprotrusion 11 can be a height-regulating jig that prevents pressing inexcess of the elastic limit of the anisotropic conductive contactor 6,

As shown in FIG. 9, the protrusion 11 may be higher than the thicknessof the anisotropic conductive contactor 6 and may be used to engage witha recess 4 a provided in the mounting substrate 4. The recess 4 a isprovided at a position of the mounting substrate 4 opposing theprotrusion 11. The position of the package substrate 1 on the mountingsubstrate 4 is determined by engaging the protrusion 11 and the recess 4a,

Sixth Embodiment

FIG. 10 is a schematic configuration diagram showing a sixth embodiment,and is an embodiment in which the anisotropic conductive contactor 6 istemporarily fixed by engaging a protrusion (a convex portion) 12 formedat the mounting substrate 4. The anisotropic conductive contactor 6 isheld by the protrusion 12. The protrusion 12 may be, for example, aheat-dissipating metal, etc.

A recess 1 b is provided partially in the external electrode formationsurface 1 a of the package substrate 1; and the protrusion 12 isprovided at a position of the mounting substrate 4 opposing the recess 1b. The position of the package substrate 1 on the mounting substrate 4is determined by engaging the protrusion 12 and the recess 1 b.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modification as would fall within the scope andspirit of the inventions.

1-12. (canceled)
 13. A semiconductor device, comprising at least: apackage substrate, a semiconductor chip being mountable to the packagesubstrate; an external connection electrode provided at an externalconnection electrode formation surface of the package substrate, theexternal connection electrode having an electrical contact surface, theelectrical contact surface at the external connection electrodeformation surface being longer in a signal transmission direction thanin a direction orthogonal to the signal transmission direction; amounting substrate where the package substrate is mounted; a mountingelectrode provided at a position of the mounting substrate opposing theexternal connection electrode, the mounting electrode having anelectrical contact surface, the electrical contact surface of themounting electrode being longer in the signal transmission directionthan in the direction orthogonal to the signal transmission direction;and an anisotropic conductive contactor inserted between the externalconnection electrode and the mounting electrode, the anisotropicconductive contactor electrically connecting the external connectionelectrode and the mounting electrode, each longitudinal direction of theexternal connection electrode and the mounting electrode are aligned inthe signal transmission direction, the external connection electrodehaving a first signal connection point of the external connectionelectrode being provided at a first end portion in the longitudinaldirection of the external connection electrode, the mounting electrodehaving a second signal connection point of the mounting electrode beingprovided at a second end portion of the mounting electrode, the secondend portion of the mounting electrode being opposite, in thelongitudinal direction, to the first signal connection point of theexternal connection electrode facing to the mounting electrode, theanisotropic conductive contactor including a conductive core arrayelectrically connecting the external connection electrode and themounting electrode, the conductive core array providing a feedthroughconnection between upper and lower surfaces of the anisotropicconductive contactor, an arrangement pitch of the conductive core arraybeing narrower than a width of the external connection electrode in thedirection orthogonal to the signal transmission direction and a width ofthe mounting electrode in the direction orthogonal to the signaltransmission direction.
 14. The device according to claim 13, wherein anarrangement direction of the conductive core array is in a directiondifferent from the signal transmission direction.
 15. The deviceaccording to claim 13, wherein the external connection electrodes have astaggered arrangement in the direction orthogonal to the signaltransmission direction at the external connection electrode formationsurface of the package substrate.
 16. The device according to claim 13,further comprising: a first via connected to the first signal connectionpoint of the external connection electrode; and a second via connectedto the second signal connection point of the mounting electrode.
 17. Thedevice according to claim 13, further comprising: a first transmissionline provided at the package substrate and connected to the first signalconnection point of the external connection electrode, and a secondtransmission line provided at the mounting substrate opposing theexternal connection electrode formation surface of the package substrateand connected to the second signal connection point of the mountingelectrode.
 18. The device according to claim 13, wherein the mountingsubstrate has a cavity made of a partial recess, the mounting electrodeis formed inside the cavity, and a position of the package substrate onthe mounting substrate is determined by the cavity.
 19. The deviceaccording to claim 18, wherein a recess opening of the cavity is apolygon, an exterior form of the anisotropic conductive contactormatches a configuration of the recess opening, and an arrangementdirection of the conductive core array is in a direction different fromthe signal transmission direction.
 20. The device according to claim 13,wherein a protrusion is provided partially at the external connectionelectrode formation surface of the package substrate, the protrusionbeing lower than a thickness of the anisotropic conductive contactor,and the anisotropic conductive contactor is held by the protrusion. 21.The device according to claim 13, wherein a protrusion is providedpartially at the external connection electrode formation surface of thepackage substrate, the protrusion being higher than a thickness of theanisotropic conductive contactor, a recess is provided in the mountingsubstrate at a position opposing the protrusion, and a position of thepackage substrate on the mounting substrate is determined by theprotrusion and the recess engaging.
 22. The device according to claim21, wherein the anisotropic conductive contactor is held by theprotrusion.
 23. The device according to claim 13, wherein a recess isprovided partially in the external connection electrode formationsurface of the package substrate, a protrusion is provided at a positionof the mounting substrate opposing the recess, the protrusion beinghigher than a thickness of the anisotropic conductive contactor, and aposition of the package substrate on the mounting substrate isdetermined by the recess and the protrusion engaging.
 24. deviceaccording to claim 23, wherein the anisotropic conductive contactor isheld by the protrusion.
 25. A semiconductor device, comprising at least:a package substrate, a semiconductor chip being mountable to the packagesubstrate; an external connection electrode provided at an externalconnection electrode formation surface of the package substrate, theexternal connection electrode having an electrical contact surface, alength in a first direction of the electrical contact surface beinglonger than a length in a second direction orthogonal to the firstdirection of the electrical contact surface; a mounting substrate wherethe package substrate is mounted; a mounting electrode provided at aposition of the mounting substrate opposing the external connectionelectrode, the mounting electrode having an electrical contact surface,a length in the first direction of the electrical contact surface of themounting electrode being longer than a length in the second direction ofthe electrical contact surface of the mounting electrode; and ananisotropic conductive contactor inserted between the externalconnection electrode and the mounting electrode, the anisotropicconductive contactor electrically connecting the external connectionelectrode and the mounting electrode, the external connection electrodehaving a first signal connection point of the external connectionelectrode being provided at a first end portion in the first directionof the external connection electrode, the mounting electrode having asecond signal connection point of the mounting electrode being providedat a second end portion of the mounting electrode, the second endportion of the mounting electrode being opposite, in the firstdirection, to the first signal connection point of the externalconnection electrode facing to the mounting electrode, the anisotropicconductive contactor including a conductive core array electricallyconnecting the external connection electrode and the mounting electrode,the conductive core array providing a feedthrough connection betweenupper and lower surfaces of the anisotropic conductive contactor, anarrangement pitch of the conductive core array being narrower than thelength of the external connection electrode in the second direction andthe length of the mounting electrode in the second direction.
 26. Thedevice according to claim 25, wherein an arrangement direction of theconductive core array is in a direction different from the firstdirection.
 27. The device according to claim 25, wherein the externalconnection electrodes have a staggered arrangement in the seconddirection at the external connection electrode formation surface of thepackage substrate.
 28. The device according to claim 25, furthercomprising: a first via connected to the first signal connection pointof the external connection electrode; and a second via connected to thesecond signal connection point of the mounting electrode.
 29. The deviceaccording to claim 25, further comprising: a first transmission lineprovided at the package substrate and connected to the first signalconnection point of the external connection electrode, and a secondtransmission line provided at the mounting substrate opposing theexternal connection electrode formation surface of the package substrateand connected to the second signal connection point of the mountingelectrode.
 30. The device according to claim 25, wherein the mountingsubstrate has a cavity made of a partial recess, the mounting electrodeis formed inside the cavity, and a position of the package substrate onthe mounting substrate is determined by the cavity.
 31. The deviceaccording to claim 30, wherein a recess opening of the cavity is apolygon, an exterior form of the anisotropic conductive contactormatches a configuration of the recess opening, and an arrangementdirection of the conductive core array is in a direction different fromthe first direction.
 32. The device according to claim 25, wherein aprotrusion is provided partially at the external connection electrodeformation surface of the package substrate, the protrusion being lowerthan a thickness of the anisotropic conductive contactor, and theanisotropic conductive contactor is held by the protrusion.